Performance of a high resolution chemically amplified electron beam resist at various beam energies

Richard Palmer, Dongxu Yang, Andreas Frommhold, A. McClelland, J. Roth, M. Rosamond, E.H. Linfield, J. Osmond, Alexander Robinson

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

156 Downloads (Pure)

2 results

Finished
Impact Acceleration Account - UOB 2012
Tickell, A.
Engineering & Physical Science Research Council
1/10/12 → 31/03/17
Project: Research Councils
Materials Program Platform Grant : Nanostructured Surfaces
Palmer, R., Guo, Q., Li, Z., Kaplan, A. & Robinson, A.
Engineering & Physical Science Research Council
1/07/07 → 31/12/11
Project: Research Councils