Performance of a high resolution chemically amplified electron beam resist at various beam energies

Richard Palmer, Dongxu Yang, Andreas Frommhold, A. McClelland, J. Roth, M. Rosamond, E.H. Linfield, J. Osmond, Alexander Robinson

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

203 Downloads (Pure)

Filter

Finished
Impact Acceleration Account - UOB 2012
Tickell, A. (Principal Investigator)
Engineering & Physical Science Research Council
1/10/12 → 31/03/17
Project: Research Councils
Materials Program Platform Grant : Nanostructured Surfaces
Palmer, R. (Principal Investigator), Guo, Q. (Co-Investigator), Li, Z. (Co-Investigator), Kaplan, A. (Co-Investigator) & Robinson, A. (Co-Investigator)
Engineering & Physical Science Research Council
1/07/07 → 31/12/11
Project: Research Councils

Projects