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Alex Robinson

Prof

 https://orcid.org/0000-0002-9158-0383

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PhD projects

Alex Robinson's research focus is on the development of new materials and techniques for nanofabrication using electron beam lithography and next generation techniques such as extreme ultraviolet lithography, together with the development of novel devices and nanopatterned surfaces.

Dr Robinson is interested in supervising doctoral research students in the following areas:

The development of nanofabrication techniques such as high-resolution lithography, guided self assembly, and nanoscale plasma etching.
The application of nanofabrication techniques in the field of electronic devices, novel sensors, and patterned surfaces.

1998 …2025

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  • EUV lithography patterning using multi-trigger resist

    Popescu, C., O'callaghan, G., Mcclelland, A., Storey, C., Roth, J., Jackson, E. A., Robinson, A. & Guerrero, D. (Editor), 9 Apr 2024, Advances in Patterning Materials and Processes XLI. SPIE, p. 25 ( Proceedings of SPIE; vol. 12957).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

  • Modeling of multi-trigger resists

    Dos santos, T. J., Belete, Z., Erdmann, A., Robinson, A., Popescu, C., Mcclelland, A., Behringer, U. F. (Editor) & Finders, J. (Editor), 18 Sept 2024, 39th European Mask and Lithography Conference (EMLC 2024). SPIE, p. 10 (Proceedings of SPIE; vol. 13273).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

    Open Access
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    31 Downloads (Pure)

  • EUV lithography patterning using multi-trigger resist

    Popescu, C., O'callaghan, G., Mcclelland, A., Storey, C., Roth, J., Jackson, E. A. & Robinson, A., 30 Apr 2023, Advances in Patterning Materials and Processes XL. SPIE, p. 36 (Proccedings of SPIE; vol. 12498).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

  • Multi-Trigger Resist for EUV lithography

    Popescu, C., O'callaghan, G., Storey, C., Mcclelland, A., Roth, J., Jackson, E. & Robinson, A. P. G., 15 Jun 2023, In: Journal of Photopolymer Science and Technology. 36, 5, p. 353-357 5 p.

    Research output: Contribution to journal › Article › peer-review

  • Ultra-high carbon fullerene-based spin-on-carbon hardmasks

    Brown, A. G., Dawson, G., Jackson, E. A., Schofield, B., Lada, T. & Robinson, A., 30 Apr 2023, Advances in Patterning Materials and Processes XL. SPIE, p. 66 (Proceedings of SPIE; vol. 12498).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

    File
    10 Downloads (Pure)
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