Original language | English |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
DOIs | |
Publication status | Published - 2012 |
Positive tone chemically amplified fullerene resist
J. Manyam, A. Frommhold, D.X. Yang, A. Mcclelland, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
10
Citations
(Scopus)