Positive tone chemically amplified fullerene resist

J. Manyam, A. Frommhold, D.X. Yang, A. Mcclelland, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2012

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