Fullerene-based spin-on-carbon hardmask

A. Frommhold, J. Manyam, R.E. Palmer, A.P.G Robinson

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

301 Downloads (Pure)

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Finished
EPSRC/FSE Collaboration ref APGR/EPSRC-10-1 - Next Generation Resist Technology for the Semiconductor Industry
Robinson, A.
Engineering & Physical Science Research Council
8/04/11 → 7/07/12
Project: Research Councils