Exposure mechanism of fullerene derivative electron beam resists

Research output: Contribution to journalArticlepeer-review

Authors

  • R.E. Palmer
  • T. Tada
  • T. Kanayama
  • E.J. Shelley

Colleges, School and Institutes

Details

Original languageUndefined/Unknown
JournalChemical Physics Letters
Publication statusPublished - 1999