Exposure mechanism of fullerene derivative electron beam resists

A.P.G. Robinson, R.E. Palmer, T. Tada, T. Kanayama, E.J. Shelley, D. Philp, J.A. Preece

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)
Original languageUndefined/Unknown
JournalChemical Physics Letters
DOIs
Publication statusPublished - 1999

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