Gold nanoparticle patterning of silicon wafers using chemical e-beam lithography

Engineering & Materials Science

• Biosensors 38%
• Electron beam lithography 48%
• Electron beams 37%
• Electronic equipment 26%
• Fabrication 23%
• Gold nanoparticles 100%
• Lithography 68%
• Nanoparticles 62%
• Optical devices 40%
• Self assembled monolayers 49%
• Self assembly 41%
• Silicon 24%
• Silicon wafers 76%

Physics & Astronomy

• affinity 17%
• assembly 26%
• bioinstrumentation 17%
• citrates 19%
• electron beams 22%
• electronics 8%
• fabrication 9%
• gold 49%
• lithography 52%
• nanoparticles 42%
• self assembly 16%
• silicon 34%
• wafers 47%

Chemistry

• Amino Groups 26%
• Electron Beam 68%
• Gold Nanoparticle 52%
• Nanoparticle 31%
• Nitro Group 32%
• Self Assembled Monolayer 30%
• Surface 20%