Abstract
The development of patterning materials (“resists”) at the nanoscale involves two distinct trends: one is toward high sensitivity and resolution for miniaturization, the other aims at functionalization of the resists to realize bottom-up construction of distinct nanoarchitectures. Patterning of carbon nanostructures, a seemingly ideal application for organic functional resists, has been highly reliant on complicated pattern transfer processes because of a lack of patternable precursors. Herein, we present a fullerene–metal coordination complex as a fabrication material for direct functional patterning of sub-10 nm metal-containing carbon structures. The attachment of one platinum atom per fullerene molecule not only leads to significant improvement of sensitivity and resolution but also enables stable atomic dispersion of the platinum ions within the carbon matrix, which may gain fundamentally new interest in functional patterning of hierarchical carbon nanostructures.
Original language | English |
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Pages (from-to) | 1578-1586 |
Number of pages | 9 |
Journal | Journal of Physical Chemistry Letters |
Volume | 13 |
Issue number | 6 |
Early online date | 9 Feb 2022 |
DOIs | |
Publication status | Published - 17 Feb 2022 |
Keywords
- Fullerene
- Organometallic
- Lithography
- Photoresist
ASJC Scopus subject areas
- Materials Chemistry
- Organic Chemistry