Towards automation in AFM based nanomanipulation and electron beam indjuced deposition for microstructuring

F Krohs, T Luttermann, C Stolle, S Fatikow, EB Brousseau, Stefan Dimov

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Pages	118-123
Number of pages	6
Publication status	Published - 1 Jan 2008
Event	Fourth international conference on multi-material micro manufacture - Duration: 1 Jan 2008 → …

Conference	Fourth international conference on multi-material micro manufacture
Period	1/01/08 → …

Cite this

@conference{4348fedec18a4c72a60547db86173882,

title = "Towards automation in AFM based nanomanipulation and electron beam indjuced deposition for microstructuring",

author = "F Krohs and T Luttermann and C Stolle and S Fatikow and EB Brousseau and Stefan Dimov",

year = "2008",

month = jan,

day = "1",

language = "English",

pages = "118--123",

note = "Fourth international conference on multi-material micro manufacture ; Conference date: 01-01-2008",

}

TY - CONF

T1 - Towards automation in AFM based nanomanipulation and electron beam indjuced deposition for microstructuring

AU - Krohs, F

AU - Luttermann, T

AU - Stolle, C

AU - Fatikow, S

AU - Brousseau, EB

AU - Dimov, Stefan

PY - 2008/1/1

Y1 - 2008/1/1

M3 - Paper

SP - 118

EP - 123

T2 - Fourth international conference on multi-material micro manufacture

Y2 - 1 January 2008

ER -