Study of Focused Ion Beam Microfabrication in Foturan (TM) Photosensitive Glass

Carl Anthony, Philip Prewett, Kyle Jiang, Michael Ward, PT Docker

Research output: Contribution to conference (unpublished)Paper

Original languageEnglish
Number of pages10
Publication statusPublished - 1 Jan 2008
EventAIP Conference Proceedings -
Duration: 1 Jan 2009 → …


ConferenceAIP Conference Proceedings
Period1/01/09 → …


  • Foturan
  • Gas assisted etching
  • photosensitive glass
  • Focused Ion beam

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