Robust control of a piezoelectric stage under thermal and external load disturbances

Mohammad Motamedi; Seyed Mehdi Rezaei; Mohammad Zareinejad; Mozafar Saadat

doi:10.1109/ACC.2009.5160546

Robust control of a piezoelectric stage under thermal and external load disturbances

Mohammad Motamedi^*, Seyed Mehdi Rezaei, Mohammad Zareinejad, Mozafar Saadat

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Piezoelectric actuators are widely used inmicromanipulation tasks such as Atomic Force Microscopy andCell Manipulation. However, the hysteresis nonlinearity andthe creep reduce their fidelity and cause difficulties in themicromanipulation control procedure. Besides, variation oftemperature and external loads could change the modeparameters identified for the piezo actuator. In this paper, anovel feedforward-feedback controller is proposed. ThePrandtl-Ishlinskii model is utilized to linearize the actuatorhysteresis in feedforward scheme and ad sliding mode based impedance control with perturbation estimation is used tocancel out the thermal and external load disturbances infeedback scheme. The efficiency of the proposed controller is verified by experiments.

Original language	English
Title of host publication	2009 American Control Conference, ACC 2009
Pages	2260-2265
Number of pages	6
DOIs	https://doi.org/10.1109/ACC.2009.5160546
Publication status	Published - 2009
Event	2009 American Control Conference, ACC 2009 - St. Louis, MO, United States Duration: 10 Jun 2009 → 12 Jun 2009

Publication series

Name	Proceedings of the American Control Conference
ISSN (Print)	0743-1619

Conference

Conference	2009 American Control Conference, ACC 2009
Country/Territory	United States
City	St. Louis, MO
Period	10/06/09 → 12/06/09

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ACC.2009.5160546

Cite this

@inproceedings{cec93d8780604540bc10adb2ae8060a4,

title = "Robust control of a piezoelectric stage under thermal and external load disturbances",

abstract = "Piezoelectric actuators are widely used inmicromanipulation tasks such as Atomic Force Microscopy andCell Manipulation. However, the hysteresis nonlinearity andthe creep reduce their fidelity and cause difficulties in themicromanipulation control procedure. Besides, variation oftemperature and external loads could change the modeparameters identified for the piezo actuator. In this paper, anovel feedforward-feedback controller is proposed. ThePrandtl-Ishlinskii model is utilized to linearize the actuatorhysteresis in feedforward scheme and ad sliding mode based impedance control with perturbation estimation is used tocancel out the thermal and external load disturbances infeedback scheme. The efficiency of the proposed controller is verified by experiments.",

author = "Mohammad Motamedi and Rezaei, {Seyed Mehdi} and Mohammad Zareinejad and Mozafar Saadat",

year = "2009",

doi = "10.1109/ACC.2009.5160546",

language = "English",

isbn = "9781424445240",

series = "Proceedings of the American Control Conference",

pages = "2260--2265",

booktitle = "2009 American Control Conference, ACC 2009",

note = "2009 American Control Conference, ACC 2009 ; Conference date: 10-06-2009 Through 12-06-2009",

}

Motamedi, M, Rezaei, SM, Zareinejad, M & Saadat, M 2009, Robust control of a piezoelectric stage under thermal and external load disturbances. in 2009 American Control Conference, ACC 2009., 5160546, Proceedings of the American Control Conference, pp. 2260-2265, 2009 American Control Conference, ACC 2009, St. Louis, MO, United States, 10/06/09. https://doi.org/10.1109/ACC.2009.5160546

TY - GEN

T1 - Robust control of a piezoelectric stage under thermal and external load disturbances

AU - Motamedi, Mohammad

AU - Rezaei, Seyed Mehdi

AU - Zareinejad, Mohammad

AU - Saadat, Mozafar

PY - 2009

Y1 - 2009

N2 - Piezoelectric actuators are widely used inmicromanipulation tasks such as Atomic Force Microscopy andCell Manipulation. However, the hysteresis nonlinearity andthe creep reduce their fidelity and cause difficulties in themicromanipulation control procedure. Besides, variation oftemperature and external loads could change the modeparameters identified for the piezo actuator. In this paper, anovel feedforward-feedback controller is proposed. ThePrandtl-Ishlinskii model is utilized to linearize the actuatorhysteresis in feedforward scheme and ad sliding mode based impedance control with perturbation estimation is used tocancel out the thermal and external load disturbances infeedback scheme. The efficiency of the proposed controller is verified by experiments.

AB - Piezoelectric actuators are widely used inmicromanipulation tasks such as Atomic Force Microscopy andCell Manipulation. However, the hysteresis nonlinearity andthe creep reduce their fidelity and cause difficulties in themicromanipulation control procedure. Besides, variation oftemperature and external loads could change the modeparameters identified for the piezo actuator. In this paper, anovel feedforward-feedback controller is proposed. ThePrandtl-Ishlinskii model is utilized to linearize the actuatorhysteresis in feedforward scheme and ad sliding mode based impedance control with perturbation estimation is used tocancel out the thermal and external load disturbances infeedback scheme. The efficiency of the proposed controller is verified by experiments.

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U2 - 10.1109/ACC.2009.5160546

DO - 10.1109/ACC.2009.5160546

M3 - Conference contribution

AN - SCOPUS:70449627924

SN - 9781424445240

T3 - Proceedings of the American Control Conference

SP - 2260

EP - 2265

BT - 2009 American Control Conference, ACC 2009

T2 - 2009 American Control Conference, ACC 2009

Y2 - 10 June 2009 through 12 June 2009

ER -

Robust control of a piezoelectric stage under thermal and external load disturbances

Abstract

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Conference

ASJC Scopus subject areas

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