TY - GEN
T1 - Robust control of a piezoelectric stage under thermal and external load disturbances
AU - Motamedi, Mohammad
AU - Rezaei, Seyed Mehdi
AU - Zareinejad, Mohammad
AU - Saadat, Mozafar
PY - 2009
Y1 - 2009
N2 - Piezoelectric actuators are widely used inmicromanipulation tasks such as Atomic Force Microscopy andCell Manipulation. However, the hysteresis nonlinearity andthe creep reduce their fidelity and cause difficulties in themicromanipulation control procedure. Besides, variation oftemperature and external loads could change the modeparameters identified for the piezo actuator. In this paper, anovel feedforward-feedback controller is proposed. ThePrandtl-Ishlinskii model is utilized to linearize the actuatorhysteresis in feedforward scheme and ad sliding mode based impedance control with perturbation estimation is used tocancel out the thermal and external load disturbances infeedback scheme. The efficiency of the proposed controller is verified by experiments.
AB - Piezoelectric actuators are widely used inmicromanipulation tasks such as Atomic Force Microscopy andCell Manipulation. However, the hysteresis nonlinearity andthe creep reduce their fidelity and cause difficulties in themicromanipulation control procedure. Besides, variation oftemperature and external loads could change the modeparameters identified for the piezo actuator. In this paper, anovel feedforward-feedback controller is proposed. ThePrandtl-Ishlinskii model is utilized to linearize the actuatorhysteresis in feedforward scheme and ad sliding mode based impedance control with perturbation estimation is used tocancel out the thermal and external load disturbances infeedback scheme. The efficiency of the proposed controller is verified by experiments.
UR - http://www.scopus.com/inward/record.url?scp=70449627924&partnerID=8YFLogxK
U2 - 10.1109/ACC.2009.5160546
DO - 10.1109/ACC.2009.5160546
M3 - Conference contribution
AN - SCOPUS:70449627924
SN - 9781424445240
T3 - Proceedings of the American Control Conference
SP - 2260
EP - 2265
BT - 2009 American Control Conference, ACC 2009
T2 - 2009 American Control Conference, ACC 2009
Y2 - 10 June 2009 through 12 June 2009
ER -