@inproceedings{a6980ecfc98e4444ad4956f2d9927b77,
title = "Precision material removal using the electrokinetic phenomenon",
author = "Leo, {C. S.} and Blackburn, {T. L.} and Ng, {S. H.} and Chun Yang and Butler, {D. L.} and S. Danyluk",
year = "2008",
language = "English",
isbn = "9781887706483",
series = "Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE",
booktitle = "Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE",
note = "23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE ; Conference date: 19-10-2008 Through 24-10-2008",
}