Optimization of a novel micro-opto-X-ray imaging lens

H Ostadi; M Arroyo; Philip Prewett; Kyle Jiang; SE Huq

doi:10.1016/j.mee.2008.01.096

Optimization of a novel micro-opto-X-ray imaging lens

H Ostadi, M Arroyo, Philip Prewett, Kyle Jiang, SE Huq

Mechanical Engineering

Research output: Contribution to journal › Article

2 Citations (Scopus)

Abstract

A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots - up to 111 at 2 mu m width. (C) 2008 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1086-1088
Number of pages	3
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
DOIs	https://doi.org/10.1016/j.mee.2008.01.096
Publication status	Published - 1 Jan 2008

Keywords

micro-opto-electro-mechanical systems
finite element analysis
X-ray focusing
thermal bimorph
microcantilever

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10.1016/j.mee.2008.01.096

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@article{e2bd678ea80445cba8a476bd903e3fcb,

title = "Optimization of a novel micro-opto-X-ray imaging lens",

abstract = "A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots - up to 111 at 2 mu m width. (C) 2008 Elsevier B.V. All rights reserved.",

keywords = "micro-opto-electro-mechanical systems, finite element analysis, X-ray focusing, thermal bimorph, microcantilever",

author = "H Ostadi and M Arroyo and Philip Prewett and Kyle Jiang and SE Huq",

year = "2008",

month = jan,

day = "1",

doi = "10.1016/j.mee.2008.01.096",

language = "English",

volume = "85",

pages = "1086--1088",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "Elsevier",

number = "5-6",

}

TY - JOUR

T1 - Optimization of a novel micro-opto-X-ray imaging lens

AU - Ostadi, H

AU - Arroyo, M

AU - Prewett, Philip

AU - Jiang, Kyle

AU - Huq, SE

PY - 2008/1/1

Y1 - 2008/1/1

N2 - A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots - up to 111 at 2 mu m width. (C) 2008 Elsevier B.V. All rights reserved.

AB - A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots - up to 111 at 2 mu m width. (C) 2008 Elsevier B.V. All rights reserved.

KW - micro-opto-electro-mechanical systems

KW - finite element analysis

KW - X-ray focusing

KW - thermal bimorph

KW - microcantilever

U2 - 10.1016/j.mee.2008.01.096

DO - 10.1016/j.mee.2008.01.096

M3 - Article

SN - 1873-5568

VL - 85

SP - 1086

EP - 1088

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-6

ER -

Optimization of a novel micro-opto-X-ray imaging lens

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Keywords

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