On-Wafer Measurements of Tuneability in Ba₀₊₅Sr₀₊₅TiO₃ Thin Films

PM Suherman, Timothy Jackson, K Koutsonas, Radoslav Chakalov, Michael Lancaster

Research output: Contribution to journalArticle

3 Citations (Scopus)


On-wafer dielectric measurements of Ba0.5Sr0.5TiO3 thin films have been established over broad frequency ranges (40 Hz-50 GHz), using metallic coplanar transmission lines patterned onto the films. The films show tuneability of 27% and 18% at 1.6 kV cm(-1) for low and microwave frequencies, respectively.
Original languageEnglish
Pages (from-to)133-137
Number of pages5
JournalIntegrated Ferroelectrics
Issue number1
Publication statusPublished - 1 Jan 2004


  • thin film
  • tuneability
  • barium strontium titanate
  • on-wafer measurement
  • ferroelecttic


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