On-Wafer Measurements of Tuneability in Ba₀₊₅Sr₀₊₅TiO₃ Thin Films

PM Suherman; Timothy Jackson; K Koutsonas; Radoslav Chakalov; Michael Lancaster

doi:10.1080/10584580490459044

On-Wafer Measurements of Tuneability in Ba₀₊₅Sr₀₊₅TiO₃ Thin Films

PM Suherman, Timothy Jackson, K Koutsonas, Radoslav Chakalov, Michael Lancaster

Research output: Contribution to journal › Article

3 Citations (Scopus)

Abstract

On-wafer dielectric measurements of Ba0.5Sr0.5TiO3 thin films have been established over broad frequency ranges (40 Hz-50 GHz), using metallic coplanar transmission lines patterned onto the films. The films show tuneability of 27% and 18% at 1.6 kV cm(-1) for low and microwave frequencies, respectively.

Original language	English
Pages (from-to)	133-137
Number of pages	5
Journal	Integrated Ferroelectrics
Volume	61
Issue number	1
DOIs	https://doi.org/10.1080/10584580490459044
Publication status	Published - 1 Jan 2004

Keywords

thin film
tuneability
barium strontium titanate
on-wafer measurement
ferroelecttic

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10.1080/10584580490459044

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abstract = "On-wafer dielectric measurements of Ba0.5Sr0.5TiO3 thin films have been established over broad frequency ranges (40 Hz-50 GHz), using metallic coplanar transmission lines patterned onto the films. The films show tuneability of 27% and 18% at 1.6 kV cm(-1) for low and microwave frequencies, respectively.",

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AU - Chakalov, Radoslav

AU - Lancaster, Michael

PY - 2004/1/1

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AB - On-wafer dielectric measurements of Ba0.5Sr0.5TiO3 thin films have been established over broad frequency ranges (40 Hz-50 GHz), using metallic coplanar transmission lines patterned onto the films. The films show tuneability of 27% and 18% at 1.6 kV cm(-1) for low and microwave frequencies, respectively.

KW - thin film

KW - tuneability

KW - barium strontium titanate

KW - on-wafer measurement

KW - ferroelecttic

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ER -

On-Wafer Measurements of Tuneability in Ba₀₊₅Sr₀₊₅TiO₃ Thin Films

Abstract

Keywords

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