On the fundamental mechanisms of active screen plasma nitriding

SC Gallo, Hanshan Dong

Research output: Contribution to journalArticle

86 Citations (Scopus)

Abstract

The nitriding mechanisms of conventional DC plasma treatments have been extensively studied and discussed, but no general agreement has been reached thus far. The sputtering and redeposition theory is among the most accepted ones but, even though this mechanism is feasible, its contribution to the nitriding effect is under question. Furthermore, the novel active screen plasma nitriding technique has been successful in treating samples left at floating potential, where sputtering can not be considered to play a major role. Therefore, it has been proposed that the material sputtered from the cathodic mesh of the active screen furnace (auxiliary cathode) and deposited onto the treated specimens is involved in the mass transfer of nitrogen. The contribution made by this transferred material is the focus of attention of the present study. The hardening effect on the treated specimens showed considerable correlation with the deposition layer, and the XRD analysis of this deposited material yielded possible FeN and FexN peaks. This finding supports the deposition of iron nitrides and their subsequent decomposition on the treated substrate as a mechanism of significance to the plasma nitriding treatments conducted in active screen experimental settings. (C) 2009 Elsevier Ltd. All rights reserved.
Original languageEnglish
Pages (from-to)321-325
Number of pages5
JournalVacuum
Volume84
Issue number2
DOIs
Publication statusPublished - 1 Sept 2009

Keywords

  • Plasma nitriding
  • Iron nitride
  • Active screen
  • Nitriding mechanisms

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