Abstract
© 2015 Yi Qin Published by Elsevier Inc. All rights reserved. Ceramic materials have been fabricated using various forming processes for its great promise in applications where the operating conditions are harsh. However, there has been hardly research work invested to produce freestanding ceramic components for micro-electromechanical systems applications. This chapter discusses the soft lithography as a robust process for the fabrication of freestanding micro-ceramic components. The aim is to fill the technical gap in precision fabrication by developing a high-quality ceramic micro-fabrication approach suitable for mass production. The research can be divided into three main sections. In the first section, fabrication processes of high-precision hard and soft molds were studied and optimized. In the second section, different slurry systems to fill soft molds were evaluated. Finally, characterization of the sintered parts is included with the aim to find the proper composition and processing parameters.
| Original language | English |
|---|---|
| Title of host publication | Micromanufacturing Engineering and Technology: Second Edition |
| Pages | 239-256 |
| Number of pages | 18 |
| DOIs | |
| Publication status | Published - 18 May 2015 |
Keywords
- Ceramic
- MEMS
- Micro-components
- Net shape
- Soft lithography