Length scale integration:  Implementation of a new process chain for producing replication masters with micro and nano scale features

P Vella, Stefan Dimov, EB Brousseau, E Minev, T Dobrev, P Petkov, V Velkova

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	8th International Conference onMulti-Material Micro Manufacture, 1/01/11
Publication status	Published - 1 Jan 2011

Cite this

@inproceedings{57d27e6d00574059a3f90881bc1b4498,

title = "Length scale integration: Implementation of a new process chain for producing replication masters with micro and nano scale features",

author = "P Vella and Stefan Dimov and EB Brousseau and E Minev and T Dobrev and P Petkov and V Velkova",

year = "2011",

month = jan,

day = "1",

language = "English",

booktitle = "8th International Conference onMulti-Material Micro Manufacture, 1/01/11",

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TY - GEN

T1 - Length scale integration: Implementation of a new process chain for producing replication masters with micro and nano scale features

AU - Vella, P

AU - Dimov, Stefan

AU - Brousseau, EB

AU - Minev, E

AU - Dobrev, T

AU - Petkov, P

AU - Velkova, V

PY - 2011/1/1

Y1 - 2011/1/1

M3 - Conference contribution

BT - 8th International Conference onMulti-Material Micro Manufacture, 1/01/11

ER -