Length scale integration: Implementation of a new process chain for producing replication masters with micro and nano scale features

P Vella, Stefan Dimov, EB Brousseau, E Minev, T Dobrev, P Petkov, V Velkova

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication8th International Conference onMulti-Material Micro Manufacture, 1/01/11
Publication statusPublished - 1 Jan 2011

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