Investigation of a new process chain based on atomic force microscopy scratching

V Saile, K Ehmann, Stefan Dimov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	5th International Conference on Multi-Material Micro Manufacture, 1/01/09
Publication status	Published - 1 Jan 2009

Cite this

@inproceedings{1c23a7d6406f490180171f35f12e1b60,

title = "Investigation of a new process chain based on atomic force microscopy scratching",

author = "V Saile and K Ehmann and Stefan Dimov",

year = "2009",

month = jan,

day = "1",

language = "English",

booktitle = "5th International Conference on Multi-Material Micro Manufacture, 1/01/09",

}