Abstract
Focused Ion Beam (FIB) technology has become an indispensable enabling tool for micro nano fabrications. One important application is to use FIB for patterning conducting nanowires of metals down to a few tens of nanometre for applications such as interconnects, heaters and temperature nanosensors. A series of experiments on Au nanowires fabricated by FIB on SixNy membrane show that nanowires with width
Original language | English |
---|---|
Pages (from-to) | 2840-2843 |
Number of pages | 4 |
Journal | Microelectron Engineering |
Volume | 88 |
Issue number | 9 |
Early online date | 12 May 2011 |
DOIs | |
Publication status | Published - 1 Sept 2011 |
Keywords
- Focused Ion Beam
- Nanowire
- Rayleigh-Plateau instability