Improvements in the structural integrity of green ceramic microcomponents by a modified soft moulding process

In this paper, a soft moulding method involving the use of elastomeric poly(dimethylsiloxane) (PDMS) moulds is described for micropatterning and microfabrication of ceramic components for microelectromechanical systems (MEMS) applications. The properties and microstructure of the green bodies have a direct effect on the ability to carry out some of the moulding procedures, as well as affecting the properties of the final sintered microcomponents. High packing density and mechanical strength are required for maintaining structural integrity and resisting the demoulding forces. Centrifuging force and appropriate binder systems have been introduced in the soft moulding process, and shown to be helpful in achieving uniform and dense green microcomponents with feature sizes of <100 mu m and high aspect ratio structures (<10). (c) 2006 Elsevier Ltd. All rights reserved.