| Original language | English |
|---|---|
| Publication status | Published - 17 Mar 2005 |
| Event | Proceedings Eurosensors 2004 - Duration: 17 Mar 2005 → … |
Conference
| Conference | Proceedings Eurosensors 2004 |
|---|---|
| Period | 17/03/05 → … |
Focused ion beam fabrication of thermally activated bimorph cantilevers
Jason Teng, Philip Prewett
Research output: Contribution to conference (unpublished) › Paper