FIB sputtering optimization using ion reverse software

S Zaitzev, A Svintsov, G Lalev, Stefan Dimov, V Valkova, H Hirshy

Research output: Contribution to journal › Article

11 Citations (Scopus)

Original language	English
Pages (from-to)	544-547
Number of pages	4
Journal	Microelectronic Engineering
Volume	86
Issue number	4-6
Publication status	Published - 1 Jan 2009

Cite this

@article{be7d577cc1c34d9a9520fe1b39c96ee1,

title = "FIB sputtering optimization using ion reverse software",

author = "S Zaitzev and A Svintsov and G Lalev and Stefan Dimov and V Valkova and H Hirshy",

year = "2009",

month = jan,

day = "1",

language = "English",

volume = "86",

pages = "544--547",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "Elsevier",

number = "4-6",

}