Fabrication of diamond micro size tool using FIB

X. Ding; G. C. Lim; David Lee Butler; C. K. Cheng

Fabrication of diamond micro size tool using FIB

X. Ding^*, G. C. Lim, David Lee Butler, C. K. Cheng

^*Corresponding author for this work

Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A study was undertaken to investigate the feasibility of sputtering a SCD (single crystal diamond) tool using FIB (Focused Ion Beam). The machining removal rate, surface morphology and form accuracy were evaluated with respect to the ion beam parameters through sputtering pockets on the top diamond surface.

Original language	English
Title of host publication	Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Editors	E. Thornett
Publisher	euspen
Pages	477-480
Number of pages	4
ISBN (Electronic)	0955308224, 9780955308222
Publication status	Published - 2007
Event	7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 - Bremen, Germany Duration: 20 May 2007 → 24 May 2007

Publication series

Name	Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Volume	2

Conference

Conference	7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Country/Territory	Germany
City	Bremen
Period	20/05/07 → 24/05/07

ASJC Scopus subject areas

General Materials Science
Instrumentation
Environmental Engineering
Industrial and Manufacturing Engineering
Mechanical Engineering

Cite this

Ding, X., Lim, G. C., Lee Butler, D., & Cheng, C. K. (2007). Fabrication of diamond micro size tool using FIB. In E. Thornett (Ed.), Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 (pp. 477-480). (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007; Vol. 2). euspen.

Ding, X. ; Lim, G. C. ; Lee Butler, David et al. / Fabrication of diamond micro size tool using FIB. Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. editor / E. Thornett. euspen, 2007. pp. 477-480 (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007).

@inproceedings{43f8119a44444ba58860d76058ff4408,

title = "Fabrication of diamond micro size tool using FIB",

abstract = "A study was undertaken to investigate the feasibility of sputtering a SCD (single crystal diamond) tool using FIB (Focused Ion Beam). The machining removal rate, surface morphology and form accuracy were evaluated with respect to the ion beam parameters through sputtering pockets on the top diamond surface.",

author = "X. Ding and Lim, {G. C.} and {Lee Butler}, David and Cheng, {C. K.}",

year = "2007",

language = "English",

series = "Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007",

publisher = "euspen",

pages = "477--480",

editor = "E. Thornett",

booktitle = "Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007",

note = "7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 ; Conference date: 20-05-2007 Through 24-05-2007",

}

Ding, X, Lim, GC, Lee Butler, D & Cheng, CK 2007, Fabrication of diamond micro size tool using FIB. in E Thornett (ed.), Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007, vol. 2, euspen, pp. 477-480, 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007, Bremen, Germany, 20/05/07.

Fabrication of diamond micro size tool using FIB. / Ding, X.; Lim, G. C.; Lee Butler, David et al.
Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. ed. / E. Thornett. euspen, 2007. p. 477-480 (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fabrication of diamond micro size tool using FIB

AU - Ding, X.

AU - Lim, G. C.

AU - Lee Butler, David

AU - Cheng, C. K.

PY - 2007

Y1 - 2007

N2 - A study was undertaken to investigate the feasibility of sputtering a SCD (single crystal diamond) tool using FIB (Focused Ion Beam). The machining removal rate, surface morphology and form accuracy were evaluated with respect to the ion beam parameters through sputtering pockets on the top diamond surface.

AB - A study was undertaken to investigate the feasibility of sputtering a SCD (single crystal diamond) tool using FIB (Focused Ion Beam). The machining removal rate, surface morphology and form accuracy were evaluated with respect to the ion beam parameters through sputtering pockets on the top diamond surface.

UR - http://www.scopus.com/inward/record.url?scp=84908233502&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84908233502

T3 - Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

SP - 477

EP - 480

BT - Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

A2 - Thornett, E.

PB - euspen

T2 - 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

Y2 - 20 May 2007 through 24 May 2007

ER -

Ding X, Lim GC, Lee Butler D, Cheng CK. Fabrication of diamond micro size tool using FIB. In Thornett E, editor, Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. euspen. 2007. p. 477-480. (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007).

Fabrication of diamond micro size tool using FIB

Abstract

Publication series

Conference

ASJC Scopus subject areas

Fingerprint

Cite this