@inproceedings{43f8119a44444ba58860d76058ff4408,
title = "Fabrication of diamond micro size tool using FIB",
abstract = "A study was undertaken to investigate the feasibility of sputtering a SCD (single crystal diamond) tool using FIB (Focused Ion Beam). The machining removal rate, surface morphology and form accuracy were evaluated with respect to the ion beam parameters through sputtering pockets on the top diamond surface.",
author = "X. Ding and Lim, {G. C.} and {Lee Butler}, David and Cheng, {C. K.}",
year = "2007",
language = "English",
series = "Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007",
publisher = "euspen",
pages = "477--480",
editor = "E. Thornett",
booktitle = "Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007",
note = "7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 ; Conference date: 20-05-2007 Through 24-05-2007",
}