@inproceedings{a334ac1fde7e41e8ac78ae13b62f00cf,
title = "Environmentally benign material removal processes for the fabrication of microdevices",
author = "Steven Danyluk and Travis Blackburn and David Butler and Seng, {Leo Cheng}",
year = "2009",
doi = "10.4028/www.scientific.net/MSF.620-622.451",
language = "English",
isbn = "0878493271",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "451--456",
booktitle = "10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009",
note = "10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009 ; Conference date: 13-01-2009 Through 15-01-2009",
}