Environmentally benign material removal processes for the fabrication of microdevices

Steven Danyluk*, Travis Blackburn, David Butler, Leo Cheng Seng

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
Original languageEnglish
Title of host publication10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009
PublisherTrans Tech Publications Ltd
Pages451-456
Number of pages6
ISBN (Print)0878493271, 9780878493272
DOIs
Publication statusPublished - 2009
Event10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009 - Xian, China
Duration: 13 Jan 200915 Jan 2009

Publication series

NameMaterials Science Forum
Volume620 622
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009
Country/TerritoryChina
CityXian
Period13/01/0915/01/09

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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