Environmentally benign material removal processes for the fabrication of microdevices

Steven Danyluk; Travis Blackburn; David Butler; Leo Cheng Seng

doi:10.4028/www.scientific.net/MSF.620-622.451

Environmentally benign material removal processes for the fabrication of microdevices

Steven Danyluk^*, Travis Blackburn, David Butler, Leo Cheng Seng

^*Corresponding author for this work

Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Original language	English
Title of host publication	10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009
Publisher	Trans Tech Publications Ltd
Pages	451-456
Number of pages	6
ISBN (Print)	0878493271, 9780878493272
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.620-622.451
Publication status	Published - 2009
Event	10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009 - Xian, China Duration: 13 Jan 2009 → 15 Jan 2009

Publication series

Name	Materials Science Forum
Volume	620 622
ISSN (Print)	0255-5476
ISSN (Electronic)	1662-9752

Conference

Conference	10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009
Country/Territory	China
City	Xian
Period	13/01/09 → 15/01/09

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.4028/www.scientific.net/MSF.620-622.451

Cite this

Danyluk, S., Blackburn, T., Butler, D., & Seng, L. C. (2009). Environmentally benign material removal processes for the fabrication of microdevices. In 10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009 (pp. 451-456). (Materials Science Forum; Vol. 620 622). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.620-622.451

@inproceedings{a334ac1fde7e41e8ac78ae13b62f00cf,

title = "Environmentally benign material removal processes for the fabrication of microdevices",

author = "Steven Danyluk and Travis Blackburn and David Butler and Seng, {Leo Cheng}",

year = "2009",

doi = "10.4028/www.scientific.net/MSF.620-622.451",

language = "English",

isbn = "0878493271",

series = "Materials Science Forum",

publisher = "Trans Tech Publications Ltd",

pages = "451--456",

booktitle = "10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009",

note = "10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009 ; Conference date: 13-01-2009 Through 15-01-2009",

}

Danyluk, S, Blackburn, T, Butler, D & Seng, LC 2009, Environmentally benign material removal processes for the fabrication of microdevices. in 10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009. Materials Science Forum, vol. 620 622, Trans Tech Publications Ltd, pp. 451-456, 10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009, Xian, China, 13/01/09. https://doi.org/10.4028/www.scientific.net/MSF.620-622.451

Environmentally benign material removal processes for the fabrication of microdevices. / Danyluk, Steven; Blackburn, Travis; Butler, David et al.
10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009. Trans Tech Publications Ltd, 2009. p. 451-456 (Materials Science Forum; Vol. 620 622).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Blackburn, Travis

AU - Butler, David

AU - Seng, Leo Cheng

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BT - 10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009

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T2 - 10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009

Y2 - 13 January 2009 through 15 January 2009

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