| Original language | English |
|---|---|
| Title of host publication | Micromanufacturing and Nanotechnology |
| Publication status | Published - 1 Jan 2006 |
e-Beam Nanolithography Integrated with Nanoassembly: Precision Chemical Engineering
Paula Mendes, Jon Preece, NP Mahalik
Research output: Chapter in Book/Report/Conference proceeding › Chapter
1
Citation
(Scopus)