Design and fabrication of a micro reciprocating engine using ultra-thick SU-8 photoresist, Euspen

Kyle Jiang, Peng Jin, Philip Prewett

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 1 Jan 2002
Event	Applications of Microtechnology, Nanotechnology & Precision Engineering - Duration: 1 Jan 2002 → …

Conference	Applications of Microtechnology, Nanotechnology & Precision Engineering
Period	1/01/02 → …

Cite this

@conference{d894b0121d804dfaab6734c94aa6a383,

title = "Design and fabrication of a micro reciprocating engine using ultra-thick SU-8 photoresist, Euspen",

author = "Kyle Jiang and Peng Jin and Philip Prewett",

year = "2002",

month = jan,

day = "1",

language = "English",

note = "Applications of Microtechnology, Nanotechnology & Precision Engineering ; Conference date: 01-01-2002",

}