Bending characteristics of SU-8

JPF Spratley, Michael Ward, Peter Hall

Research output: Contribution to journalArticle

8 Citations (Scopus)


This study characterises SU-8's material properties under large deformations in out-of-plane bending. A novel test setup is presented to deform the SU-8 to high levels, and a mathematical model presented that accurately predicts the results. This test shows that hard-baked SU-8, with a Young's modulus tested at 1.9 GPa, is capable of undergoing stresses of up to 120 MPa before failure and in some cases will undergo plastic deformation.
Original languageEnglish
Pages (from-to)20-23
Number of pages4
JournalMicro & Nano Letters
Issue number2
Publication statusPublished - 1 Jun 2007


Dive into the research topics of 'Bending characteristics of SU-8'. Together they form a unique fingerprint.

Cite this