Bending characteristics of SU-8

JPF Spratley; Michael Ward; Peter Hall

doi:10.1049/mnl:20070022

Bending characteristics of SU-8

JPF Spratley, Michael Ward, Peter Hall

Research output: Contribution to journal › Article

8 Citations (Scopus)

Abstract

This study characterises SU-8's material properties under large deformations in out-of-plane bending. A novel test setup is presented to deform the SU-8 to high levels, and a mathematical model presented that accurately predicts the results. This test shows that hard-baked SU-8, with a Young's modulus tested at 1.9 GPa, is capable of undergoing stresses of up to 120 MPa before failure and in some cases will undergo plastic deformation.

Original language	English
Pages (from-to)	20-23
Number of pages	4
Journal	Micro & Nano Letters
Volume	2
Issue number	2
DOIs	https://doi.org/10.1049/mnl:20070022
Publication status	Published - 1 Jun 2007

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10.1049/mnl:20070022

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abstract = "This study characterises SU-8's material properties under large deformations in out-of-plane bending. A novel test setup is presented to deform the SU-8 to high levels, and a mathematical model presented that accurately predicts the results. This test shows that hard-baked SU-8, with a Young's modulus tested at 1.9 GPa, is capable of undergoing stresses of up to 120 MPa before failure and in some cases will undergo plastic deformation.",

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AB - This study characterises SU-8's material properties under large deformations in out-of-plane bending. A novel test setup is presented to deform the SU-8 to high levels, and a mathematical model presented that accurately predicts the results. This test shows that hard-baked SU-8, with a Young's modulus tested at 1.9 GPa, is capable of undergoing stresses of up to 120 MPa before failure and in some cases will undergo plastic deformation.

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JO - Micro & Nano Letters

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Bending characteristics of SU-8

Abstract

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