This study characterises SU-8's material properties under large deformations in out-of-plane bending. A novel test setup is presented to deform the SU-8 to high levels, and a mathematical model presented that accurately predicts the results. This test shows that hard-baked SU-8, with a Young's modulus tested at 1.9 GPa, is capable of undergoing stresses of up to 120 MPa before failure and in some cases will undergo plastic deformation.
|Number of pages||4|
|Journal||Micro & Nano Letters|
|Publication status||Published - 1 Jun 2007|