An ultrathick SU-8 process using UV-lithography

Kyle Jiang, Peng Jin

Research output: Contribution to conference (unpublished)Paper

Original languageEnglish
Pages45-49
Number of pages5
Publication statusPublished - 31 Dec 2003
EventProceedings of the 3rd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics -
Duration: 31 Dec 2003 → …

Conference

ConferenceProceedings of the 3rd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics
Period31/12/03 → …

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