A novel process for rapid prototyping released MEMS structures using maskless manufacture and the one step DRIE process

Peter Docker, Peter Kinnell, Michael Ward

Research output: Contribution to conference (unpublished) › Paper

Conference	Eurosensors
Period	2/12/04 → …

Cite this

@conference{31d8f2c6f91f4c76b699cfa3570ccdb5,

title = "A novel process for rapid prototyping released MEMS structures using maskless manufacture and the one step DRIE process",

author = "Peter Docker and Peter Kinnell and Michael Ward",

year = "2004",

month = dec,

day = "2",

language = "English",

note = "Eurosensors ; Conference date: 02-12-2004",

}