| Original language | English |
|---|---|
| Publication status | Published - 12 Mar 2004 |
| Event | Nano-Tech 2004 Conference - Duration: 12 Mar 2004 → … |
Conference
| Conference | Nano-Tech 2004 Conference |
|---|---|
| Period | 12/03/04 → … |
A novel method for determining optimum etch times for the one step dry release process
Peter Docker, Peter Kinnell, Michael Ward
Research output: Contribution to conference (unpublished) › Paper