A methodology for technology maturity assessment of micro and nano manufacturing processes and process chains

PC Vella, EB Brousseau, R Minev, Stefan Dimov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Fifth international Conference on Micro Manufacturing, 1/01/10
Publication status	Published - 1 Jan 2010

Cite this

@inproceedings{2f76a127ed4c4793928499c81b65d3e7,

title = "A methodology for technology maturity assessment of micro and nano manufacturing processes and process chains",

author = "PC Vella and EB Brousseau and R Minev and Stefan Dimov",

year = "2010",

month = jan,

day = "1",

language = "English",

booktitle = "Fifth international Conference on Micro Manufacturing, 1/01/10",

}