WR-3 Waveguide Bandpass Filters Fabricated Using High Precision CNC Machining and SU-8 Photoresist Technology

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WR-3 Waveguide Bandpass Filters Fabricated Using High Precision CNC Machining and SU-8 Photoresist Technology. / Yang, Hao; Dhayalan, Yuvaraj; Shang, Xiaobang; Lancaster, Michael J.; Liu, Bo; Wang, Hui; Henry, Manju; Huggard, Peter G.

In: IEEE Transactions on Terahertz Science and Technology, Vol. 8, No. 1, 01.2018, p. 100 - 107.

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@article{9c26dd62878643528a6f79b972642939,
title = "WR-3 Waveguide Bandpass Filters Fabricated Using High Precision CNC Machining and SU-8 Photoresist Technology",
abstract = "This paper presents two WR-3 band (220-325 GHz) filters, one fabricated in metal using high precision computer numerically controlled milling and the other made with metallized SU-8 photoresist technology. Both are based on three coupled resonators, and are designed for a 287.3-295.9-GHz passband, and a 30-dB rejection between 317.7 and 325.9 GHz. The first filter is an extracted pole filter coupled by irises, and is precision milled using the split-block approach. The second filter is composed of three silver-coated SU-8 layers, each 432 µm thick. The filter structures are specially chosen to take advantage of the fabrication processes. When fabrication tolerances are accounted for, very good agreement between measurements and simulations are obtained, with median passband insertion losses of 0.41 and 0.45 dB for the metal and SU-8 devices, respectively. These two filters are potential replacements of frequency selective surface filters used in heterodyne radiometers for unwanted sideband rejection.",
keywords = "Micromachining, SU-8, terahertz components, waveguide filter",
author = "Hao Yang and Yuvaraj Dhayalan and Xiaobang Shang and Lancaster, {Michael J.} and Bo Liu and Hui Wang and Manju Henry and Huggard, {Peter G.}",
year = "2018",
month = jan,
doi = "10.1109/TTHZ.2017.2775441",
language = "English",
volume = "8",
pages = "100 -- 107",
journal = "IEEE Transactions on Terahertz Science and Technology",
issn = "2156-342X",
publisher = "IEEE Xplore",
number = "1",

}

RIS

TY - JOUR

T1 - WR-3 Waveguide Bandpass Filters Fabricated Using High Precision CNC Machining and SU-8 Photoresist Technology

AU - Yang, Hao

AU - Dhayalan, Yuvaraj

AU - Shang, Xiaobang

AU - Lancaster, Michael J.

AU - Liu, Bo

AU - Wang, Hui

AU - Henry, Manju

AU - Huggard, Peter G.

PY - 2018/1

Y1 - 2018/1

N2 - This paper presents two WR-3 band (220-325 GHz) filters, one fabricated in metal using high precision computer numerically controlled milling and the other made with metallized SU-8 photoresist technology. Both are based on three coupled resonators, and are designed for a 287.3-295.9-GHz passband, and a 30-dB rejection between 317.7 and 325.9 GHz. The first filter is an extracted pole filter coupled by irises, and is precision milled using the split-block approach. The second filter is composed of three silver-coated SU-8 layers, each 432 µm thick. The filter structures are specially chosen to take advantage of the fabrication processes. When fabrication tolerances are accounted for, very good agreement between measurements and simulations are obtained, with median passband insertion losses of 0.41 and 0.45 dB for the metal and SU-8 devices, respectively. These two filters are potential replacements of frequency selective surface filters used in heterodyne radiometers for unwanted sideband rejection.

AB - This paper presents two WR-3 band (220-325 GHz) filters, one fabricated in metal using high precision computer numerically controlled milling and the other made with metallized SU-8 photoresist technology. Both are based on three coupled resonators, and are designed for a 287.3-295.9-GHz passband, and a 30-dB rejection between 317.7 and 325.9 GHz. The first filter is an extracted pole filter coupled by irises, and is precision milled using the split-block approach. The second filter is composed of three silver-coated SU-8 layers, each 432 µm thick. The filter structures are specially chosen to take advantage of the fabrication processes. When fabrication tolerances are accounted for, very good agreement between measurements and simulations are obtained, with median passband insertion losses of 0.41 and 0.45 dB for the metal and SU-8 devices, respectively. These two filters are potential replacements of frequency selective surface filters used in heterodyne radiometers for unwanted sideband rejection.

KW - Micromachining

KW - SU-8

KW - terahertz components

KW - waveguide filter

U2 - 10.1109/TTHZ.2017.2775441

DO - 10.1109/TTHZ.2017.2775441

M3 - Article

AN - SCOPUS:85037588017

VL - 8

SP - 100

EP - 107

JO - IEEE Transactions on Terahertz Science and Technology

JF - IEEE Transactions on Terahertz Science and Technology

SN - 2156-342X

IS - 1

ER -