Uncertainties in the permittivity of thin films extracted from measurements with near field microwave microscopy calibrated by an image charge model

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@article{a2ca55b290d84edbadd40bf5923121db,
title = "Uncertainties in the permittivity of thin films extracted from measurements with near field microwave microscopy calibrated by an image charge model",
abstract = "The microwave microscope is a device which utilises near fields to characterise material properties of samples on length scales smaller than the operating wavelength. The errors associated with extracting the permittivity of a high permittivity thin film on a low permittivity substrate from measurements using such a device are found to be of the order of 25 % when using a widely used image charge model of the tip-sample interaction. The uncertainties arise from the model-based extraction of the permittivity from the raw frequency shift data, and in the current case are shown to come from the assumption in the model that the tip of the microwave probe can be modelled as a sphere.The raw data from the microscope contain random uncertainties of the order of 1 % and reveal variations in the properties of the thin film with sub-wavelength resolution demonstrating the microwave microscope as a sub-wavelength characterisation technique for thin films. ",
keywords = "Microwave Microscope, Permittivity, Thin Films",
author = "Duncan Barker and Timothy Jackson and Phe Suherman and Marina Gashinova and Michael Lancaster",
year = "2014",
month = aug,
day = "20",
doi = "10.1088/0957-0233/25/10/105601",
language = "English",
volume = "25",
journal = "Measurement Science and Technology",
issn = "0957-0233",
publisher = "IOP Publishing",
number = "10",

}

RIS

TY - JOUR

T1 - Uncertainties in the permittivity of thin films extracted from measurements with near field microwave microscopy calibrated by an image charge model

AU - Barker, Duncan

AU - Jackson, Timothy

AU - Suherman, Phe

AU - Gashinova, Marina

AU - Lancaster, Michael

PY - 2014/8/20

Y1 - 2014/8/20

N2 - The microwave microscope is a device which utilises near fields to characterise material properties of samples on length scales smaller than the operating wavelength. The errors associated with extracting the permittivity of a high permittivity thin film on a low permittivity substrate from measurements using such a device are found to be of the order of 25 % when using a widely used image charge model of the tip-sample interaction. The uncertainties arise from the model-based extraction of the permittivity from the raw frequency shift data, and in the current case are shown to come from the assumption in the model that the tip of the microwave probe can be modelled as a sphere.The raw data from the microscope contain random uncertainties of the order of 1 % and reveal variations in the properties of the thin film with sub-wavelength resolution demonstrating the microwave microscope as a sub-wavelength characterisation technique for thin films.

AB - The microwave microscope is a device which utilises near fields to characterise material properties of samples on length scales smaller than the operating wavelength. The errors associated with extracting the permittivity of a high permittivity thin film on a low permittivity substrate from measurements using such a device are found to be of the order of 25 % when using a widely used image charge model of the tip-sample interaction. The uncertainties arise from the model-based extraction of the permittivity from the raw frequency shift data, and in the current case are shown to come from the assumption in the model that the tip of the microwave probe can be modelled as a sphere.The raw data from the microscope contain random uncertainties of the order of 1 % and reveal variations in the properties of the thin film with sub-wavelength resolution demonstrating the microwave microscope as a sub-wavelength characterisation technique for thin films.

KW - Microwave Microscope

KW - Permittivity

KW - Thin Films

U2 - 10.1088/0957-0233/25/10/105601

DO - 10.1088/0957-0233/25/10/105601

M3 - Article

VL - 25

JO - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

IS - 10

M1 - 105601

ER -