Towards 11nm half-pitch resolution for a negative-tone chemically amplified molecular resist platform for extreme-ultraviolet lithography

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Research Projects

  1. Materials Program Platform Grant : Nanostructured Surfaces

    Richard Palmer, Quanmin Guo, Zi Li, Andre Kaplan & Alex Robinson

    ENGINEERING & PHYSICAL SCIENCE RESEARCH COUNCIL

    1/07/0731/12/11

    Project: Research Councils