Systematic studies of fullerene derivative electron beam resists

Research output: Contribution to conference (unpublished)Paper

Details

Original languageEnglish
Pages115-120
Number of pages6
Publication statusPublished - 1 Jan 2000
EventMaterials Research Society Symposium Proceedings -
Duration: 1 Jan 2006 → …

Conference

ConferenceMaterials Research Society Symposium Proceedings
Period1/01/06 → …