Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Standard

Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. / Glynn, David; He, Tianhao; Powell, Jeff; Tian, Yingtao; Shang, Xiaobang; Lancaster, Michael J.

EuMIC 2016 - 11th European Microwave Integrated Circuits Conference. Institute of Electrical and Electronics Engineers (IEEE), 2016. p. 417-420 7777580.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Harvard

Glynn, D, He, T, Powell, J, Tian, Y, Shang, X & Lancaster, MJ 2016, Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. in EuMIC 2016 - 11th European Microwave Integrated Circuits Conference., 7777580, Institute of Electrical and Electronics Engineers (IEEE), pp. 417-420, 11th European Microwave Integrated Circuits Conference, EuMIC 2016, London, United Kingdom, 3/10/16. https://doi.org/10.1109/EuMIC.2016.7777580

APA

Glynn, D., He, T., Powell, J., Tian, Y., Shang, X., & Lancaster, M. J. (2016). Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. In EuMIC 2016 - 11th European Microwave Integrated Circuits Conference (pp. 417-420). [7777580] Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/EuMIC.2016.7777580

Vancouver

Glynn D, He T, Powell J, Tian Y, Shang X, Lancaster MJ. Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. In EuMIC 2016 - 11th European Microwave Integrated Circuits Conference. Institute of Electrical and Electronics Engineers (IEEE). 2016. p. 417-420. 7777580 https://doi.org/10.1109/EuMIC.2016.7777580

Author

Glynn, David ; He, Tianhao ; Powell, Jeff ; Tian, Yingtao ; Shang, Xiaobang ; Lancaster, Michael J. / Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. EuMIC 2016 - 11th European Microwave Integrated Circuits Conference. Institute of Electrical and Electronics Engineers (IEEE), 2016. pp. 417-420

Bibtex

@inproceedings{11d89c83deaa4187872333d0395d808f,
title = "Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology",
abstract = "Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.",
keywords = "micromachining, SU-8, waveguide",
author = "David Glynn and Tianhao He and Jeff Powell and Yingtao Tian and Xiaobang Shang and Lancaster, {Michael J.}",
year = "2016",
month = dec,
day = "8",
doi = "10.1109/EuMIC.2016.7777580",
language = "English",
pages = "417--420",
booktitle = "EuMIC 2016 - 11th European Microwave Integrated Circuits Conference",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
note = "11th European Microwave Integrated Circuits Conference, EuMIC 2016 ; Conference date: 03-10-2016 Through 04-10-2016",

}

RIS

TY - GEN

T1 - Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

AU - Glynn, David

AU - He, Tianhao

AU - Powell, Jeff

AU - Tian, Yingtao

AU - Shang, Xiaobang

AU - Lancaster, Michael J.

PY - 2016/12/8

Y1 - 2016/12/8

N2 - Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

AB - Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

KW - micromachining

KW - SU-8

KW - waveguide

UR - http://www.scopus.com/inward/record.url?scp=85010332986&partnerID=8YFLogxK

U2 - 10.1109/EuMIC.2016.7777580

DO - 10.1109/EuMIC.2016.7777580

M3 - Conference contribution

AN - SCOPUS:85010332986

SP - 417

EP - 420

BT - EuMIC 2016 - 11th European Microwave Integrated Circuits Conference

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - 11th European Microwave Integrated Circuits Conference, EuMIC 2016

Y2 - 3 October 2016 through 4 October 2016

ER -