Original language | English |
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Patent number | WO/2013/117908 |
Publication status | Published - 15 Aug 2013 |
Spin on Hard-mask material
Alexander Robinson (Inventor), Andreas Frommhold (Inventor), Jedsada Manyam (Inventor)
Research output: Patent
Alexander Robinson (Inventor), Andreas Frommhold (Inventor), Jedsada Manyam (Inventor)
Research output: Patent
Original language | English |
---|---|
Patent number | WO/2013/117908 |
Publication status | Published - 15 Aug 2013 |