Abstract
The increasing demand for micro-products and components can be met only partly by the lithography-based micro-electromechanical systems fabrication processes that originated from the silicon-based microelectronics revolution of the late twentieth century. In particular, such processes have limitations when applied to new micro-devices which require the use of a variety of materials and complex 3D microstructures with high aspect ratios. In this context, the paper presents technologies complementary to lithography-based processes for the manufacture of devices or components incorporating micro- and nano-scale features. More specifically, special attention is given to the main findings obtained over the last 5 years from the authors’ research programme on a range of micro- and nano-manufacturing technologies, namely, micro-electrodischarge machining, laser ablation, micro-milling, focussed-ion beam machining, micro-injection moulding, nano-imprint lithography, hot embossing and electroforming.
Original language | English |
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Pages (from-to) | 161-180 |
Number of pages | 20 |
Journal | The International Journal of Advanced Manufacturing Technology |
Volume | 47 |
Issue number | 1-4 |
Early online date | 7 Aug 2009 |
DOIs | |
Publication status | Published - Mar 2010 |
Event | 3rd Multi-Material Micro Manufacture Conference (4M 2007) - Borovets, Bulgaria Duration: 3 Oct 2007 → 5 Oct 2007 |
Keywords
- Micro-manufacture
- Nano-manufacture
- Micro-EDM
- Micro-milling
- Laser machining
- Focussed ion beam
- Micro-injection moulding
- Nano-imprint lithography
- Electroforming
- Hot embossing