Quantitative evaluation of electron beam writing in passivated gold nanoclusters
Research output: Contribution to journal › Letter
Colleges, School and Institutes
We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 1 Jan 2001|