Quantitative evaluation of electron beam writing in passivated gold nanoclusters

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We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.


Original languageEnglish
Pages (from-to)1921-1923
Number of pages3
JournalApplied Physics Letters
Issue number13
Publication statusPublished - 1 Jan 2001