Plasma Etching of High-resolution Features in a Fullerene Molecular Resist

Jedsada Manyam, Mayandithevar Manickam, Jon Preece, Richard Palmer, Alexander Robinson

Research output: Contribution to journalAbstract

21 Citations (Scopus)
Original languageEnglish
Article number79722N
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume7972
DOIs
Publication statusPublished - 15 Apr 2011

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