Permittivity and loss characteristics of SU8-quartz composite photoresist at THz frequencies

Jung-Mu Kim; Michael Lancaster; Ignacio Llamas-Garro; Moises I Espinosa-Espinosa; Maolong Ke; Marcos T de Melo

doi:10.1002/mop.30041

Permittivity and loss characteristics of SU8-quartz composite photoresist at THz frequencies

Jung-Mu Kim, Michael Lancaster, Ignacio Llamas-Garro, Moises I Espinosa-Espinosa, Maolong Ke, Marcos T de Melo

Electronic, Electrical and Systems Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

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Abstract

An SU8-quartz composite photoresist has been fabricated and characterized from 1.2 to 1.4 THz; the material contains quartz particles from 0 to 50 wt%. The composite can reduce the inherent losses of SU8 photoresist at terahertz frequencies. Calculated and measured data is presented and compared to SU8 without quartz inclusions. The results show a reduction in losses and an increase in permittivity in the composite material as the density of quartz particles increases. This initial experiment proves the possibility of modifying the electrical parameters of SU8; increasing the quartz density of the composite will modify these parameters further at THz frequencies.

Original language	English
Pages (from-to)	2329–2330
Journal	Microwave and Optical Technology Letters
Volume	58
Issue number	10
Early online date	27 Jul 2016
DOIs	https://doi.org/10.1002/mop.30041
Publication status	Published - Oct 2016

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Kim_et_al_Permittivity_loss_charcateristics_Microwave_Optical_Technology_Letters
This is the peer reviewed version of the following article: Kim, J.-M., Llamas-Garro, I., Espinosa-Espinosa, M. I., Ke, M., Lancaster, M. and de Melo, M. T. (2016), Permittivity and loss characteristics of SU8-quartz composite photoresist at THz frequencies. Microw. Opt. Technol. Lett., 58: 2329–2330, which has been published in final form at http://dx.doi.org/10.1002/mop.30041. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Self-Archiving. First checked 15/7/16
Accepted author manuscript, 328 KBLicence: None: All rights reserved

Micromachined Circuits For Terahertz Communications
Lancaster, M., Constantinou, C., Dimov, S., Feresidis, A., Gardner, P., Cherniakov, M., Gashinova, M. & Huang, F.
Engineering & Physical Science Research Council
22/06/15 → 22/12/18
Project: Research

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title = "Permittivity and loss characteristics of SU8-quartz composite photoresist at THz frequencies",

abstract = "An SU8-quartz composite photoresist has been fabricated and characterized from 1.2 to 1.4 THz; the material contains quartz particles from 0 to 50 wt%. The composite can reduce the inherent losses of SU8 photoresist at terahertz frequencies. Calculated and measured data is presented and compared to SU8 without quartz inclusions. The results show a reduction in losses and an increase in permittivity in the composite material as the density of quartz particles increases. This initial experiment proves the possibility of modifying the electrical parameters of SU8; increasing the quartz density of the composite will modify these parameters further at THz frequencies.",

author = "Jung-Mu Kim and Michael Lancaster and Ignacio Llamas-Garro and Espinosa-Espinosa, {Moises I} and Maolong Ke and {de Melo}, {Marcos T}",

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AU - Lancaster, Michael

AU - Llamas-Garro, Ignacio

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AU - Ke, Maolong

AU - de Melo, Marcos T

PY - 2016/10

Y1 - 2016/10

N2 - An SU8-quartz composite photoresist has been fabricated and characterized from 1.2 to 1.4 THz; the material contains quartz particles from 0 to 50 wt%. The composite can reduce the inherent losses of SU8 photoresist at terahertz frequencies. Calculated and measured data is presented and compared to SU8 without quartz inclusions. The results show a reduction in losses and an increase in permittivity in the composite material as the density of quartz particles increases. This initial experiment proves the possibility of modifying the electrical parameters of SU8; increasing the quartz density of the composite will modify these parameters further at THz frequencies.

AB - An SU8-quartz composite photoresist has been fabricated and characterized from 1.2 to 1.4 THz; the material contains quartz particles from 0 to 50 wt%. The composite can reduce the inherent losses of SU8 photoresist at terahertz frequencies. Calculated and measured data is presented and compared to SU8 without quartz inclusions. The results show a reduction in losses and an increase in permittivity in the composite material as the density of quartz particles increases. This initial experiment proves the possibility of modifying the electrical parameters of SU8; increasing the quartz density of the composite will modify these parameters further at THz frequencies.

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DO - 10.1002/mop.30041

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JO - Microwave and Optical Technology Letters

JF - Microwave and Optical Technology Letters

IS - 10

ER -

Permittivity and loss characteristics of SU8-quartz composite photoresist at THz frequencies

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