Performance of a high resolution chemically amplified electron beam resist at various beam energies

Research output: Contribution to journalArticle

Research Projects

  1. Materials Program Platform Grant : Nanostructured Surfaces

    Richard Palmer, Quanmin Guo, Zi Li, Andre Kaplan & Alex Robinson

    ENGINEERING & PHYSICAL SCIENCE RESEARCH COUNCIL

    1/07/0731/12/11

    Project: Research Councils

  2. Impact Acceleration Account - UOB 2012

    Adam Tickell

    ENGINEERING & PHYSICAL SCIENCE RESEARCH COUNCIL

    1/10/1231/03/17

    Project: Research Councils