Overcoming material challenges for replication of Motheye Lenses using step and flash imprint lithography (S-FIL) for opto-electronic applications

Research output: Contribution to journalArticle

Authors

Colleges, School and Institutes

Details

Original languageEnglish
Pages (from-to)1794-1799
Number of pages6
JournalJournal of Vacuum Science and Technology. Part B. Nanotechnology & Microelectronics
Volume26
Issue number5
Publication statusPublished - 1 Jan 2008