Optimization of a novel micro-opto-X-ray imaging lens

Research output: Contribution to journalArticle

Authors

Colleges, School and Institutes

Abstract

A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots - up to 111 at 2 mu m width. (C) 2008 Elsevier B.V. All rights reserved.

Details

Original languageEnglish
Pages (from-to)1086-1088
Number of pages3
JournalMicroelectronic Engineering
Volume85
Issue number5-6
Publication statusPublished - 1 Jan 2008

Keywords

  • micro-opto-electro-mechanical systems, finite element analysis, X-ray focusing, thermal bimorph, microcantilever