On the calibration of rectangular atomic force microscope cantilevers modified by particle attachment and lamination

Research output: Contribution to journalArticle

Abstract

A simple but effective method for estimating the spring constant of commercially available atomic force microscope (AFM) cantilevers is presented, based on estimating the cantilever thickness from knowledge of its length, width, resonant frequency and the presence or absence of an added mass, such as a colloid probe at the cantilever apex, or a thin film of deposited material. The spring constant of the cantilever can then be estimated using standard equations for cantilever beams. The results are compared to spring constant calibration measurements performed using reference cantilevers. Additionally, the effect of the deposition of Cr and Ti thin films onto rectangular Si cantilevers is investigated.

Details

Original languageEnglish
Article number115106
Pages (from-to)115106
Number of pages1
JournalMeasurement Science and Technology
Volume21
Issue number11
Publication statusPublished - 1 Nov 2010

Keywords

  • thin film, cantilever, resonant frequency, spring constant, titanium, atomic force microscopy, x-ray photoelectron spectroscopy, vacuum evaporation, calibration, gold, chromium