Novel process chain for fabrication of Ni shims

VL Velkova, GM Lalev, H Hirshy, SG Scholz, Stefan Dimov

Research output: Contribution to conference (unpublished) › Paper

1 Citation (Scopus)

Original language	English
Pages	411-414
Number of pages	4
Publication status	Published - 1 Jan 2009
Event	4m/Icomm 2009 - The Global Conference On Micro Manufacture - Duration: 1 Jan 2009 → …

Conference	4m/Icomm 2009 - The Global Conference On Micro Manufacture
Period	1/01/09 → …

Keywords

@conference{592c0ee1f53946c884ca7b26eec01e40,

title = "Novel process chain for fabrication of Ni shims",

keywords = "replication tools, process chain, micro- and nano-manufacturing, NIL, FIB",

author = "VL Velkova and GM Lalev and H Hirshy and SG Scholz and Stefan Dimov",

year = "2009",

month = jan,

day = "1",

language = "English",

pages = "411--414",

note = "4m/Icomm 2009 - The Global Conference On Micro Manufacture ; Conference date: 01-01-2009",

}

TY - CONF

T1 - Novel process chain for fabrication of Ni shims

AU - Velkova, VL

AU - Lalev, GM

AU - Hirshy, H

AU - Scholz, SG

AU - Dimov, Stefan

PY - 2009/1/1

Y1 - 2009/1/1

KW - replication tools

KW - process chain

KW - micro- and nano-manufacturing

KW - NIL

KW - FIB

M3 - Paper

SP - 411

EP - 414

T2 - 4m/Icomm 2009 - The Global Conference On Micro Manufacture

Y2 - 1 January 2009

ER -