New high resolution liquid crystal electron beam resists

Alexander Robinson, RE Palmer, T Tada, T Kanayama, Matthew Allen, Jon Preece, Kenneth Harris

Research output: Contribution to conference (unpublished)Paper

1 Citation (Scopus)
Original languageEnglish
Pages129-134
Number of pages6
Publication statusPublished - 1 Jan 2000
EventMaterials Research Society Symposium Proceedings -
Duration: 1 Jan 2006 → …

Conference

ConferenceMaterials Research Society Symposium Proceedings
Period1/01/06 → …

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