New high resolution liquid crystal electron beam resists

Research output: Contribution to conference (unpublished)Paper

Authors

  • RE Palmer
  • T Tada
  • T Kanayama
  • Matthew Allen

Colleges, School and Institutes

Details

Original languageEnglish
Pages129-134
Number of pages6
Publication statusPublished - 1 Jan 2000
EventMaterials Research Society Symposium Proceedings -
Duration: 1 Jan 2006 → …

Conference

ConferenceMaterials Research Society Symposium Proceedings
Period1/01/06 → …