Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: growth and structural characterisation

G Abadias, Yau Tse, A Michel, C Jaouen, M Jaouen

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@article{aa3e3a615b4d49f29afc9f885b869117,

title = "Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: growth and structural characterisation",

author = "G Abadias and Yau Tse and A Michel and C Jaouen and M Jaouen",

year = "2003",

month = jun,

day = "2",

doi = "10.1016/S0040-6090(03)00307-9",

language = "English",

volume = "433",

pages = "166--173",

journal = "Thin Solid Films",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: growth and structural characterisation

AU - Abadias, G

AU - Tse, Yau

AU - Michel, A

AU - Jaouen, C

AU - Jaouen, M

PY - 2003/6/2

Y1 - 2003/6/2

U2 - 10.1016/S0040-6090(03)00307-9

DO - 10.1016/S0040-6090(03)00307-9

M3 - Article

VL - 433

SP - 166

EP - 173

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -